| 摘要 |
PROBLEM TO BE SOLVED: To form a simple structure for a robot for a vacuum environment, further reduce an inner capacity of a chamber when a workpiece is conveyed between the vacuum chamber and the air, and shorten an arrival time to a vacuum state. SOLUTION: A slide mechanism 3 having a handling part 4 for mounting a workpiece W is driven by drive means by a magnetic bond separating a bulkhead 21 for isolating a vacuum environmental space from a drive system mounting space. Thus, irrespective of a slide system, it is possible to sufficiently ensure an isolation of a drive system from the vacuum space, and a conveying system is constructed with a simpler structure than a scalar type robot. |
