| 摘要 |
The mixing devices currently on offer by manufacturers are sophisticated equipment and are therefore expensive. To achieve the thorough mixing of the various components introduced into the mixing container, an impeller is often used to set the liquid(s) in the container in motion, thus blending the components. However, all impeller devices have the inherent problem of requiring the sealing of the shaft feed opening in the mixing container. Said impeller shaft seal generates particles which lead to an unintentional reduction in the quality of the mixture. The aim of the invention is therefore to provide a mixing device for producing suspensions for the chemical-mechanical polishing of wafers. Said device comprises: a mixing container (1) filled with a liquid (2); a liquid jet pump (3) with two inlets (4, 5) and an outlet (6) that is connected to the mixing container (1); at least one system of supply lines (7) for supplying at least one substance (10) to be mixed, one end of said system being connected to one inlet (4, 5) of the liquid jet pump (3); and one system of circulating lines (8), one end of which is connected to the section of the mixing container that is filled with liquid and the other end is connected to the other inlet (5, 4) of the liquid jet pump (3). |
