Tetrahydrofuran-addierte Gruppe II-ß-Diketonat-Komplexe als Ausgangsreagenzien für chemisches Aufdampfen,申请号DE20001081315T-传众专利搜索

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发明名称	Tetrahydrofuran-addierte Gruppe II-ß-Diketonat-Komplexe als Ausgangsreagenzien für chemisches Aufdampfen
摘要
申请公布号	DE10081315(T1)	申请公布日期	2001.08.30
申请号	DE20001081315T	申请日期	2000.05.08
申请人	ADVANCED TECHNOLOGY MATERIALS, INC.	发明人	BAUM, THOMAS H.;PAW, WITOLD
分类号	C07D307/06;C07C49/92;C07F3/00;C07F5/00;C23C16/40;(IPC1-7):C07F5/00	主分类号	C07D307/06
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