| 摘要 |
PURPOSE: A fault analyzing method, derivation method of degeneracy critical value and recording medium are provided to prevent mistake of a defective shape and accurately recognize and classify a defective shape and a recording medium recording its program. CONSTITUTION: A recognition rule is read(ST1), plural degeneration(FBM) is prepared(ST2), after a defective recognition object is selected(ST3), the prescribed region is selected based on setting of defective size(ST4), and a defect rate in the prescribed region is calculated(ST5). Successively, a defective recognition object is estimated based on pars/fail condition of adjacency of a defect rate condition and a defective recognition object(ST6), a defect rate of residual degeneration(FBM) is calculated and standardized(ST7). Then a defect rate of residual degeneration(FBM) is collated with a defective shape discrimination rule, and a defective shape is specified.
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