发明名称 Method and system for management to manufacturing process for products nine
摘要 The present invention provides a system for managing a manufacturing processes including at least a batch-process for a batch which comprises plural product lots. The system comprises: a host computer; at least a batch-manufacturing apparatus for carrying out a batch-process under control of the host computer; at least a stoker for storing the plural product lots; at least a carrier for carrying the plural product lots between the batch-manufacturing apparatus and the stoker under control of the host computer, wherein a loading request is transferred from the batch-manufacturing apparatus to a host computer, and the host computer retrieves batch-processable product lots to form a batch of plural batch-processable product lots, and the batch-manufacturing apparatus verifies whether or not a lot number of the batch reaches a predetermined maximum batch-lot number, and an additional loading request is sent from the batch-manufacturing apparatus to the host computer, and the host computer is further retrieved whether or not any further additional batch-processable product lot is present, and the additional batch-processable product lot is carried to the batch-manufacturing apparatus to add the additional batch-processable product lot to the batch.
申请公布号 US2001018623(A1) 申请公布日期 2001.08.30
申请号 US20010759466 申请日期 2001.01.16
申请人 NEC CORPORATION 发明人 YAMAGISHI MASAYUKI
分类号 H01L21/677;G06Q50/00;G06Q50/04;H01L21/00;H01L21/02;(IPC1-7):G06F17/60;G06F19/00 主分类号 H01L21/677
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