ACCELERATION SENSOR, ACCELERATION SENSOR DEVICE, AND METHOD OF FABRICATING ACCELERATION SENSOR

摘要

PURPOSE: An acceleration sensor is provided to realize a further reduction in size and cost while maintaining high performance and not limit sliding vibration of a vibrator for the purpose of preventing a lowering of the detection performance. CONSTITUTION: The acceleration sensor includes a vibrator(1) formed of a piezoelectric single crystal, and a weight section(2) connected to the vibrator(1) and supported at a position different from the position of the center of gravity of an assembly of the vibrator and weight section. Two divided electrodes(1a) used for detecting an electrical signal are formed on the vibrator(1) and connected to two wiring patterns(2a) of the weight section which also functions as a signal detecting substrate, with an anisotropic conductive adhesive. When an acceleration in one direction is applied, an angular moment exerted in the weight section(2) is detected as sliding vibration by the vibrator(1) and an electrical signal corresponding to the acceleration is output from the electrodes(1a) through the wiring patterns(2a).