发明名称 |
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING THE MICROMECHANICAL COMPONENT |
摘要 |
A method for producing a micromechanical component (e.g., a capacitive acceleration sensor) having one or several electrical or mechanical function variables dependent on at least one geometric design parameter. The micromechanical component is produced by an etching process via which a structure with bars and trenches is formed. The structure is formed by drafting a design for the micromechanical component in such a way that the geometric design parameter within the local area of the micromechanical component is subject to a predetermined process-related regularity. The design parameter is essentially constant in relation to function blocks in particular, so that in the etching process, the process tolerance of the design parameter within the micromechanical component essentially shows no locus dependency.
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申请公布号 |
US2001017058(A1) |
申请公布日期 |
2001.08.30 |
申请号 |
US19990302225 |
申请日期 |
1999.04.29 |
申请人 |
BUCHAN NICHOLAS;FEHRENBACH MICHAEL;SCHUBERT DIETRICH |
发明人 |
BUCHAN NICHOLAS;FEHRENBACH MICHAEL;SCHUBERT DIETRICH |
分类号 |
H01L21/302;B62D57/00;B81B3/00;B81B5/00;B81C1/00;B81C3/00;B81C99/00;G01P15/08;G01P15/125;H01L21/306;H01L21/3065;(IPC1-7):G01F23/30;G01P15/00 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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