MICROMACHINED TWO-DIMENSIONAL ARRAY DROPLET EJECTORS

摘要

A droplet ejector (11) including a cylindrical reservoir (20) closed at one end with an elastic membrane (14) including at least one aperture (22). A bulk actuator (20) at the other end for actuating the fluid for ejection through the aperture (22). Also disclosed is a micromachined two-dimensional array droplet ejector (11). The ejector (11) includes a two-dimensional array of elastic membranes (14) having orifices (22) closing the ends of cylindrical fluid reservoirs (20). The fluid in the ejectors (11) is bulk actuated to set up pressure waves (28) in the fluid which cause fluid to form a meniscus at each orifice (22). Selective actuation of the membranes (14) ejects droplets. In an alternative mode of operation, the bulk pressure wave has sufficient amplitude to eject droplets while the individual membranes (14) are actuated to selectively prevent ejection of droplets.