| 摘要 |
An excimer or molecular fluorine laser system includes a laser tube filled with a gas mixture including fluorine and a buffer gas, and multiple electrodes (30, 32) within the laser tube connected with a pulsed discharge circuit for energizing the gas mixture. At least one of the electrodes (30, 32) is longer than 28 inches (∼71 C) length, preferably two main electrodes are each ext ended to greater than 28 (∼71 C) inches in length. The lase r system further includes a resonator including the laser tube for generating a pulsed laser beam having a desired energy. The laser system is configured such that an output beam would be emitted having an energy below the desired energy if each of the electrodes (30, 32) were 28 inches (∼71 C) in length or less, and the laser system outputs a beam at the desired energy due to the length of the electrodes (30, 32) being extended to a length greater than 28 inches (∼71 C). |
