Product used as an electronic component comprises a piezoelectric substrate, a converter structure with first contacts arranged on an active surface of the substrate

摘要

Product comprises a piezoelectric substrate (1); a converter structure (3) with first contacts (4) arranged on an active surface (2) of the substrate; and a mineral protective layer (5) applied to the active surface and the converter structure. The converter structure mediates a clear relationship between an acoustic surface wave on the active surface and an electrical signal between the first contacts. Preferred Features: The protective layer is made of silicon nitride and has an average thickness which is the same as the average thickness of the converter layer. The converter is made of aluminum. The product further comprises a chemo-sensitive layer (6) applied to the protective layer over the active layers.