| 摘要 |
<p>An inspection apparatus for inspecting a conductor pattern minutely. A sensor element (12a) comprises an MOSFET where a diffusion layer having a larger surface area and serving as a passive element faces a conductor pattern (101). The passive element is continuous with the source of the MOSFET having gate connected with a vertical selecting section (14) and a drain connected with a lateral selecting section (13). When the sensor element (12a) is selected by a timing generating section (15), a signal is delivered from the vertical selecting section (14) to the gate and the MOSFET is turned on. When an inspection signal is outputted from a probe (22), the potential of the conductor pattern (101) is varied and accordingly a current flows from the source to the drain and thence flows through the lateral selecting section (13) to a signal processing section (16). The conductor pattern (101) can be located on a circuit board (100) by analyzing the position of the sensor element (12a) outputting a detection signal.</p> |
