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发明名称
Verfahren zum Erzeugen einer Struktur auf einem Substrat
摘要
申请公布号
DE19820754(C2)
申请公布日期
2001.08.30
申请号
DE19981020754
申请日期
1998.05.08
申请人
SEIDL, GUENTER
发明人
SEIDL, GUENTER
分类号
B44C1/22;B44C3/02;B44C5/04;B44F9/04;C03C17/00;C04B41/81;C04B41/91;(IPC1-7):B44C5/04
主分类号
B44C1/22
代理机构
代理人
主权项
地址
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