A process for dicing a preform made of an oxide single crystal, and a process for producing functional devices

摘要

A process for dicing a preform (1) made of an oxide single crystal into cut pieces each having a given shape, includes the steps of removing molecules of the oxide single crystal through dissociation and evaporation with an optochemical reaction under irradiation of a laser beam (6) upon the preform, thereby forming grooves (3,4) on the preform, and then cleaving the preform along the grooves.