发明名称 APPARATUS AND METHOD OF AUTOMATICALLY CONTROLLING INTENSITY OF LASER BEAM
摘要 PURPOSE: An apparatus and a method of automatically controlling intensity of laser beam are to allow a user to automatically and precisely control the intensity and size of laser beam with only a simple input operation. CONSTITUTION: A laser beam generating portion(10) generates and outputs laser beam. An intensity measuring portion(12) measures an intensity of the laser beam generated from the laser beam generating portion. A laser beam size controlling portion has a plurality of lens portions. The laser beam size controlling portion(30) controls a distance between the lens portions responding to a beam size controlling signal to control a size of the laser beam. A controlling portion(22) operates the intensity of the laser beam measured by the intensity measuring portion and a desired beam size, and generates the beam size controlling signal according to an operated result. In the beam size controlling portion, the first lens portion(14) is fixedly disposed to enlarge the size of the laser beam. A moving lens portion(16) reduce the size of the enlarged laser beam according to a distance between the first lens portion and the moving lens. The second lens portion(18) reduced the beam size again.
申请公布号 KR20010081431(A) 申请公布日期 2001.08.29
申请号 KR20000006848 申请日期 2000.02.14
申请人 EO TECHNICS CO., LTD. 发明人 KANG, SEOK JUNG;KWON, GU CHEOL;LEE, JUN SEOK;PARK, JEONG HO
分类号 H01L21/268;(IPC1-7):H01L21/268 主分类号 H01L21/268
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