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发明名称
Improved oxide etch
摘要
申请公布号
GB0116481(D0)
申请公布日期
2001.08.29
申请号
GB20010016481
申请日期
2001.07.05
申请人
AGERE SYSTEMS GUARDIAN CORPORATION
发明人
分类号
H01L21/316;H01L21/306;H01L21/3063;H01L21/311;H01L21/76;H01L21/762
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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