| 摘要 |
PURPOSE: A method for producing device having piezoelectric films is provided to control the deposition and surface roughness of the metal layer, i.e., a lower surface roughness for the electrode results in an improved quality for the piezoelectric film. CONSTITUTION: The resonator has a substrate(110), a layer(120) of piezoelectric material, and an acoustic reflecting region(125), such as a Bragg reflecting region, between the substrate(110) and layer(120). Alternative to the reflecting region(125), a layer of air (not shown) may be used to suspend the layer(120) above the substrate(110). A bottom electrode(135) and top electrode(130) are disposed on opposite surfaces of the piezoelectric layer(120).
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