| 摘要 |
PURPOSE: A method of fabricating a zinc oxide based resonator is provided to form the zinc oxide with the highest possible crystallinity, the highest possible orientation, thus yielding the highest value for electromechanical coupling coefficient, K2, as well as the lowest possible loss for its utilization as a controllable vibrating element. CONSTITUTION: The resonator comprises a resonator substrate base. It should be apparent to one of ordinary skill in the art that resonator substrate base may also comprise an air gap acoustic cavity . Substrate base comprises a substrate layer. Substrate layer comprises silicon(Si). In the alternative, however, substrate layer may also comprise diamond, quartz, silicon carbide(SiC), sapphire(Al2O3), gallium arsenide(GaAs), as well as other materials apparent.
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