Capacitance-type pressure sensor and its manufacture

摘要

The invention relates to a capacitance-type pressure sensor which includes a plurality of pressure sensor units connected in parallel with one another and each formed on a substrate (1) by an electrode (3), a cavity region (8) and a diaphragm having an electrically conductive film (6) which is disposed in opposition to the electrode (3) with the cavity region (8) intervening between the electrode (3) and the diaphragm, wherein diaphragm fixing portions (7) are disposed internally of the cavity region (8) so that a single sheet of the diaphragm is partitionarily and regionally allotted to regions of the plural pressure sensor units, respectively. With this structure of the capacitance-type pressure sensor, ineffective regions for capacitance detection are minimized and hence the parasitic capacitance can be reduced with the detection accuracy of the sensor being improved. <??>The invention further discloses a method of manufacturing the pressure sensor. <IMAGE> <IMAGE>