BAKER UNIT OF PHOTO-LITHOGRAPHY SYSTEM

摘要

PURPOSE: A baker unit of a photo-lithography system is provided to sense a state of a wafer by installing a sensor at a plate oven. CONSTITUTION: A chamber(50) is prepared to form an airtight space. A panel(51) is installed at an outer side of the chamber(50). A plate oven is installed an inside of the chamber(50). A heating source for heating a wafer(70) is formed at an inside of the plate oven(60). A projection face(61) is formed on an upper face of the plate oven(60). The wafer(70) is loaded on the projection face(61). A multitude of guide(63) is prepared to prevent escape of the wafer(70). A sensor(67) is formed on the projection face(61) to sense a state of the loaded wafer(70).