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发明名称
Exposure apparatus
摘要
申请公布号
EP0717299(B1)
申请公布日期
2001.08.29
申请号
EP19950101619
申请日期
1995.02.07
申请人
NIKON CORPORATION
发明人
MATSUZAWA, HITOSHI;ISHII, MIKIHIKO;TANAKA, ISSEY
分类号
H01L21/027;G02B9/62;G02B13/14;G02B13/24;G03F7/20;(IPC1-7):G02B13/24
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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