| 摘要 |
<p>An electrode arrangement for a gas laser is provided. The electrode arrangement includes an elongated high voltage electrode (104), an elongated ground electrode (105) disposed adjacent to the high voltage electrode, a discharge gap between the two electrodes, an insulator element (110), a high voltage conductor (108) having a first end connected to the high voltage electrode and extending through the insulator element, and a shadow plate (210) interposed between the discharge gap and the insulator element. The electrode arrangement may be employed in a variety of gas lasers, including excimer lasers. <IMAGE></p> |
