METHOD OF PLASMA ETCHING DIELECTRIC MATERIALS,申请号KR1020017004035-传众专利搜索

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发明名称	METHOD OF PLASMA ETCHING DIELECTRIC MATERIALS
摘要
申请公布号	KR20010082216(A)	申请公布日期	2001.08.29
申请号	KR1020017004035	申请日期	2001.03.29
申请人		发明人
分类号	H01L21/311	主分类号	H01L21/311
代理机构		代理人
主权项
地址

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