发明名称 |
Photoresist stripping composition |
摘要 |
<p>Disclosed are compositions useful for the removal of polymeric material from substrates, such as electronic devices. The compositions of the present invention are particularly suitable for removing polymer residues from advanced magnetic devices. Also disclosed are methods of removing such polymeric material. The composition includes one or more polar aprotic solvents, one or more polymer dissolution enhancing bases, and one or more corrosion inhibitors, wherein the composition is substantially free of hydroxylamine or hydroxylamine derivatives.</p> |
申请公布号 |
EP1128222(A2) |
申请公布日期 |
2001.08.29 |
申请号 |
EP20010301616 |
申请日期 |
2001.02.22 |
申请人 |
SHIPLEY COMPANY LLC |
发明人 |
SAHBARI, JAVAD J.;SAHBARI, SHAWN J. |
分类号 |
C11D3/20;C11D3/00;C11D3/26;C11D3/28;C11D3/34;C11D3/43;C11D7/26;C11D7/32;C11D7/34;C11D7/50;C11D7/60;C11D11/00;C11D17/08;G03F7/42;H01L21/027;(IPC1-7):G03F7/42;C11D1/62 |
主分类号 |
C11D3/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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