| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for fluorinating the surface of a stamper without using fluorine gas as supply gas, and an apparatus for the method. SOLUTION: When an untreated stamper 10 and a fluororesin 9 are placed on an electrode 3 in a chamber 1, oxygen gas is supplied from an oxygen gas source 6, and oxygen plasma 8 is excited between the electrode 3 and a counter electrode 4 by passing the current through a high frequency power source 2, oxygen radicals in the plasma 8 collide with the surface of the fluororesin 9, and carbon and fluorine are discharged from the molecules of the resin. After the oxygen radicals collide with the surface of the stamper 10, and residual organic substances on the surface of the stamper 10 are decomposed, fluorine radicals and the oxygen radicals are bonded to a metal on the surface of the stamper 10 to form the fluoride and the oxide.
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