| 摘要 |
A combined mechanical linkage and force-measuring assembly includes a central capacitive force sensor, in which force applied to the sensor causes the flexing of a diaphragm toward and away from a substrate, and a change in the capacitance between two conductive surfaces on the diaphragm and the substrate is sensed and processed to indicate the direction and magnitude of the force applied to the linkage. The linkage may have two parts coupled together by a flange which flexes under applied forces, to change the spacing of the conductive surfaces.
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