发明名称 Reactor assembly and method of assembly
摘要 An improved anode, cup and conductor assembly for a reactor vessel includes an anode assembly supported within a cup which holds a supply of process fluid. The anode assembly has an anode shield carrying an anode, the anode shield having upwardly extending brackets with radially extending members. A diffusion plate is supported above the anode by the anode brackets using first bayonet connections. The anode shield and the anode are supported from below by a delivery tube which also serves to deliver process fluid to the cup. A second bayonet connection is provided between a top portion of the delivery tube and the anode assembly. The conductor is connected to the anode with a plug-in connection which is completed when the tube is coupled to the anode by the second bayonet connection. The diffusion plate and the anode assembly are installable and removable from a top side of the reactor vessel using a tool which is lockable to the diffusion plate or to the anode. The tool provides a handle for manual engagement or disengagement of the first and second bayonet connections.
申请公布号 US6280583(B1) 申请公布日期 2001.08.28
申请号 US19990385784 申请日期 1999.08.30
申请人 SEMITOOL, INC. 发明人 WOODRUFF DANIEL J.;HANSON KYLE M.
分类号 C25D17/00;C25D5/08;C25D7/12;C25D17/06;(IPC1-7):C25B17/00 主分类号 C25D17/00
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