发明名称 Pattern and method of metal line package level test for semiconductor device
摘要 A pattern and method of a metal line package level test for a semiconductor device, which is capable of efficiently testing characteristic of a metal line. The metal line package level test pattern includes a metal line for test, a current applying pad which is connected to both ends of the metal line, for applying a current to the metal line, a voltage sensing pattern formed at both ends of the metal line, for sensing a voltage of the metal line, and a heater for varying the temperature of the current applying pad.
申请公布号 US6282679(B1) 申请公布日期 2001.08.28
申请号 US19980188235 申请日期 1998.11.09
申请人 LG SEMICON CO., LTD. 发明人 LEE KANG YEUL
分类号 G01N27/00;G01R31/28;H01L21/66;H01L23/544;(IPC1-7):G01R31/28;H01L21/00 主分类号 G01N27/00
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