发明名称 |
DEVICE FOR DECOMPOSITION OF COMPOUND WITH HIGH FREQUENCY PLASMA, METHOD FOR DECOMPOSITION OF COMPOUND AND SYSTEM FOR DECOMPOSITION OF COMPOUND |
摘要 |
PROBLEM TO BE SOLVED: To provide a device for the decomposition of compounds by high-frequency plasma, a method for the decomposition of compounds and a system for the decomposition of compounds in which stable plasma can be maintained with low electric power and various kinds of objects to be treated can be decomposed. SOLUTION: The device for the decomposition of compounds by high-frequency plasma by applying a magnetizing current on a high-frequency coil 5 wound around a discharge tube 2 to generate induced plasma in the discharge tube 2 and to decompose the object introduced into the discharge tube 2 is equipped with a straightening means (gap 100) to straighten and introduce the object and a discharge assistant into the discharge tube 2. |
申请公布号 |
JP2001232180(A) |
申请公布日期 |
2001.08.28 |
申请号 |
JP20000050199 |
申请日期 |
2000.02.25 |
申请人 |
TOSHIBA CORP |
发明人 |
SAKANO MINA;TANAKA MOTOFUMI |
分类号 |
A62D3/17;A62D3/19;A62D101/22;B01J19/08;H05H1/46 |
主分类号 |
A62D3/17 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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