发明名称 LATERAL CONVEYING MECHANISM
摘要 PROBLEM TO BE SOLVED: To provide a lateral conveying mechanism with a simple structure capable of conveying an object to be conveyed in an atmosphere isolated from atmospheric air. SOLUTION: This mechanism is provided with a loop-liked movable endless belt 12 driven by a driving device, a chamber 20 arranged on a surface side of the belt, at least two gap parts G arranged along with the circumference of the belt, and a seal member 18 holding on the gap parts G for the chamber as a space isolated from the atmospheric air side.
申请公布号 JP2001233450(A) 申请公布日期 2001.08.28
申请号 JP20000049655 申请日期 2000.02.25
申请人 EBARA CORP 发明人 HORIE KUNIAKI
分类号 B65G15/00;B65G49/00;B65G49/07;H01L21/677;H01L21/68;(IPC1-7):B65G49/00 主分类号 B65G15/00
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