| 摘要 |
An electrode of a metal, which is one of Group IV and VI elements, is deposited on an n-type InxAlyGa1-x-yN layer. Alternatively, after an electrode material of carbon, germanium), selenium, rhodium, tellurium, iridium, zirconium, hafnium, copper, titanium nitride, tungsten nitride, molybdenum or titanium silicide, is deposited on an n-type InxAlyGa1-x-yN layer or a p-type InxAlyGa1-x-yN layer, an impurity for increasing the carrier concentration of the semiconductor layer is ion-implanted, and the annealing is carried out. Thus, it is possible to provide a light emitting semiconductor device, which has a low contact resistance and a sufficient bond strength to the InxAlyGa1-x-yN layer while maintaining the crystallinity of the InxAlyGa1-x-yN layer.
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