发明名称 Method for manufacturing electronic devices comprising non-volatile memory cells and LV transistors with salicided junctions
摘要 A method for manufacturing electronic devices, such as memory cells and LV transistors, with salicided junctions, that includes: depositing an upper layer of polycrystalline silicon; defining the upper layer, obtaining floating gate regions on first areas, LV gate regions on second areas of a substrate, and undefined regions on the first and third areas of the substrate; forming first cell source regions laterally to the floating gate regions; forming LV source and drain regions laterally to the LV gate regions; forming a silicide layer on the LV source and drain regions, on the LV gate regions, and on the undefined portions; defining HV gate regions on the third areas, and selection gate regions on the first areas; forming source regions laterally to the selection gate regions, and source and drain regions laterally to the HV gate regions.
申请公布号 US6281077(B1) 申请公布日期 2001.08.28
申请号 US19990392937 申请日期 1999.09.09
申请人 STMICROELECTRONICS S.R. L. 发明人 PATELMO MATTEO;LIBERA GIOVANNA DALLA;GALBIATI NADIA;VAJANA BRUNO
分类号 H01L21/8247;H01L27/105;(IPC1-7):H01L21/336;H01L21/823 主分类号 H01L21/8247
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