| 摘要 |
PROBLEM TO BE SOLVED: To provide a local treating device which is capable of efficiently impressing a high-frequency voltage to electrode sections. SOLUTION: The local treating device 20 has a discharge pipe 40 which allows the flow of gas for treatment, a pair of electrodes 46 and 48 which are disposed to face each other so as to hold this discharge pipe 40 in-between and leads 30 which connect this electrode 46 to a high-frequency power source. The leads 30 are formed of plural planar members and are formed by laminating these plural planar members. |
