| 摘要 |
PROBLEM TO BE SOLVED: To obtain a plasma corrosion-resistant member usable even in a microwave band at a high frequency and to provide a method for producing the member. SOLUTION: This plasma corrosion-resistant member is a member used under a plasma and having corrosion resistance to the plasma and comprises an aluminum nitride sintered compact after removing the produced grain boundary phase containing a sintering aid from the sintered compact sintered with the sintering aid. The method for producing the plasma corrosion-resistant member comprises adding the sintering aid to an aluminum nitride powder, forming the resultant mixture, sintering the obtained formed compact, then heat-treating the sintered compact at 1,600-2,000 deg.C under a carbon atmosphere and thereby providing the plasma corrosion-resistant member comprising the aluminum nitride sintered compact after removing the produced grain boundary phase containing the sintering aid from the sintered compact sintered with the sintering aid. |
