发明名称 |
Reduced particle contamination manufacturing and packaging for reticles |
摘要 |
A method of transporting a reticle is disclosed. The reticle is placed in a reticle carrier that has an ionizer. Moreover, the reticle may be attached with a pellicle. The pellicle consists of a pellicle frame and a pellicle film stretched over the pellicle frame. The pellicle frame has included within an absorbent material.
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申请公布号 |
US6279249(B1) |
申请公布日期 |
2001.08.28 |
申请号 |
US19990477795 |
申请日期 |
1999.12.30 |
申请人 |
INTEL CORPORATION |
发明人 |
DAO GIANG T.;KUSE RONALD J. |
分类号 |
H01L21/673;(IPC1-7):F26B19/00 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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