| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a neon recovering method and device capable of efficiently recovering high-purity neon from the impure gaseous neon discharged from a KrF excimer laser oscillator. SOLUTION: Fluorine is removed from the impure gaseous neon discharged from the KrF excimer laser oscillator, then the impure gaseous neon from which the fluorine is removed is cooled to gel or liquefy krypton, and the krypton is adsorbed with a low temperature adsorption device 42 to be removed from the impure gaseous neon. Then the impure gaseous neon from which the krypton is removed is moreover cooled by liquid nitrogen to gel or liquefy an impure component, and the impure component is removed from the impure gaseous neon by adsorbing with a low temperature adsorbing device 54 to obtain high purity neon. The removal of other impure components is efficiently performed by previously removing the krypton.</p> |
