发明名称 APPARATUS FOR DETECTING ERROR OF FAN MOTOR IN SEMICONDUCTOR DEVICE TESTING SYSTEM
摘要 PURPOSE: An apparatus for detecting error of a fan motor is to detect the error of the fan motor and then display the error so that a user can recognize the error, thereby providing convenience to the user. CONSTITUTION: A semiconductor device testing system has a fan motor(100), a detecting flag(200) and a controller input/output portion. A detecting portion(300) detects an on/off signal according to rotation of the fan motor and the detecting flag. A fan motor rpm monitoring board(400) estimates a difference between a signal value detected from the detecting portion and a predetermined signal value, and then delays for a desired time. Then, the monitoring board performs a logical operation between the detected signal value and the delayed signal value, and displays error of the fan motor when detecting the error, and then outputs a result signal to the controller input/output portion.
申请公布号 KR20010081276(A) 申请公布日期 2001.08.29
申请号 KR20000006489 申请日期 2000.02.11
申请人 MIRAE CORPORATION 发明人 SUN, GI SANG
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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