| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an improved method for recovering a helium gas from a multi-tiered consolidation furnace. SOLUTION: This method for recovering a helium gas comprises the following practice: a multivalve assembly is operated so as to react to the respective stages of a consolidation furnace and to the exhaust gases corresponding to the above stages, thereby the various exhaust gases are brought into a membrane separation unit, PSA, a scrubber and GRC, and N2, O2, HCl, Cl2, and H2O are removed from the gas stream.</p> |
