METHOD FOR PRODUCING MICROMECHANICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To establish an anode joining method completely preventing air from being taken in when carrying out the anode joining to improve the joining yield and to provide a joining method with high reliability. SOLUTION: This method for carrying out the anode joining of a glass with a silicon wafer or a metal surface is characterized in that the anode joining is carried out in vacuum, and the degree of the vacuum when carrying out the anode joining is regulated so as to be 1 Torr or less.