| 发明名称 |
SiGe thin film semiconductor device with SiGe layer structure and method of fabrication |
| 摘要 |
<p>A thin film semiconductor device includes: a substrate having an insulating surface; a semiconductor layer containing silicon and germanium formed on the substrate; a gate insulating film formed on the semiconductor layer; and a gate electrode formed on the gate insulating film, wherein the gate insulating film includes a thermal oxide film formed by thermally oxidizing a surface of the semiconductor layer.</p> |
| 申请公布号 |
EP0684650(B1) |
申请公布日期 |
2001.08.29 |
| 申请号 |
EP19950107868 |
申请日期 |
1995.05.23 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
TSUTSU, HIROSHI |
| 分类号 |
H01L29/78;H01L21/28;H01L21/336;H01L29/49;H01L29/786;(IPC1-7):H01L29/786;H01L21/321;H01L29/51;H01L23/532;H01L21/768 |
主分类号 |
H01L29/78 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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