| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser beam machining device having a positional deviation detecting function capable of detecting the positional deviation of a focal position of laser beams from a line to be machined during laser machining is executed. SOLUTION: An exiting optical system is transferred by a controller 4 based on a locus program. A line detecting ad processing is executed to a picture including the line to be machined from a CCD camera 13 by a picture processor 31 accompanying the transfer of the exiting optical system to detect the line to be machined. The positional deviation between a focal position of laser beams in a zone of a prescribed range which is photographed by the CCD camera and the nearest point on the detected line to be machined is detected by an arithmetic processor 32. The line is detected by the picture processor based on the locus program at the time of line detecting processing after a rough zone, which is sufficiently smaller than the zone of the prescribed range and moreover in which the line to be machined is included, is further set within the zone of the prescribed range photographed by the CCD camera.</p> |
