发明名称 WASHING METHOD OF LINER FOR PROTECTING PELLICLE ADHESIVE LAYER
摘要 <p>PROBLEM TO BE SOLVED: To provide a washing method of liner which unnecessitates any manual work in a washing operation, has high washing ability, gives no damage to a releasing layer of the surface and has high productivity. SOLUTION: It is a feature of this washing method that ultrasonic washing is performed at the sound pressure strength of 8-45 kPs on the average in an aqueous solution of surfactant. Therein, it is preferable that the washing is performed by mixingly irradiating with at least two ultrasonic waves of which the frequencies are different from each other and are in the range of 20-50 kHz at the same time. It is also preferable that the washing is performed by using the ultrasonic wave which has a frequency in the range of 20-50 kHz and repeats the modulation continuously with a band width >= at least 3 kHz. An additional finish washing by ultrasonic wave in pure water after the ultrasonic washing is more effectively performed.</p>
申请公布号 JP2001232312(A) 申请公布日期 2001.08.28
申请号 JP20000047138 申请日期 2000.02.24
申请人 SHIN ETSU CHEM CO LTD 发明人 SEKIHARA KAZUTOSHI
分类号 B08B3/08;B08B3/10;B08B3/12;B08B11/00;G03F1/62;G03F1/82;(IPC1-7):B08B3/12;G03F1/08;G03F1/14 主分类号 B08B3/08
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