| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator for use in a small system such as a micromachine, eliminating the need for high voltage and high temperature and electric wiring. SOLUTION: A polydiacetylene (PDA) thin film 2 is vapor deposited on the surface of a central portion of a movable film 1, for example, consisting of a polysilicon thin film. The movable film 1 is fixed at its sides on a silicon substrate 3, with the central portion to be freely deformable, to form the optically driven actuator. The polydiacetylene has a A-phase and a B-phase, different in principal chain linkage, both being in stable conditions. In the condition of the A-phase, when a first light having a wavelength of 450-550 mm is radiated thereto, phase transition occurs in the B-phase to cause the volume to be expanded and stabilized in this state. On the other hand, in the condition of the B- phase, when a second light having a wavelength of 350-400 mm is radiated thereto, phase transition occurs in the A-phase to cause the volume to be contracted. Such a change in volume is utilized to obtain various actuators including a valve for opening/closing an orifice.
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