| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for picking up only the image of the light part of a planar object, having a cyclic pattern without generating moire fringes caused by the interference of the pattern on the object and a CCD element concerning the image pickup device, which has a line CCD, a uniaxial stage movable vertically with respect to the pixel locating direction of the line CCD, a chuck for fixing the object on the uniaxial stage and a light source for illuminating the object, for recording the two-dimensional image of the object, by reading CCD outputs parallel with stage moving and storing them on a storage device. SOLUTION: This device has a photosensor fixed at a place, where the light intensity of one point on the object can be detected, for converting the changes in the incident optical intensity with the movement of the uniaxial stage into a pulse-shaped electric signal and outputting it and a frequency multiplying circuit for multiplying the output of the photosensor, and the electrical signal outputted by the frequency multiplying circuit is inputted as the read clock of the line CCD.
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