发明名称 |
MOLDING WITH ANTICLOUDING THIN FILM AND METHOD FOR PRODUCING SAME |
摘要 |
PROBLEM TO BE SOLVED: To obtain a molding with an anticlouding thin film whose anticlouding property is retained over a long period of time. SOLUTION: The molding has a multilayer antireflection film on a substrate and a thin inorganic oxide film having anticlouding property formed on the antireflection film by sputtering. The thin inorganic oxide film has finely rugged aggregates whose RMS value is 10-500 Å depth over the entire surface. |
申请公布号 |
JP2001228304(A) |
申请公布日期 |
2001.08.24 |
申请号 |
JP20000045152 |
申请日期 |
2000.02.17 |
申请人 |
NIKON CORP |
发明人 |
SUZUKI MASASHI;NAKAMURA TORU;MIYAGAWA AKIKO |
分类号 |
G02B5/08;G02B1/11 |
主分类号 |
G02B5/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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