发明名称 MOLDING WITH ANTICLOUDING THIN FILM AND METHOD FOR PRODUCING SAME
摘要 PROBLEM TO BE SOLVED: To obtain a molding with an anticlouding thin film whose anticlouding property is retained over a long period of time. SOLUTION: The molding has a multilayer antireflection film on a substrate and a thin inorganic oxide film having anticlouding property formed on the antireflection film by sputtering. The thin inorganic oxide film has finely rugged aggregates whose RMS value is 10-500 Å depth over the entire surface.
申请公布号 JP2001228304(A) 申请公布日期 2001.08.24
申请号 JP20000045152 申请日期 2000.02.17
申请人 NIKON CORP 发明人 SUZUKI MASASHI;NAKAMURA TORU;MIYAGAWA AKIKO
分类号 G02B5/08;G02B1/11 主分类号 G02B5/08
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