EVALUATION METHOD AND DEVICE FOR ELECTRON EMISSION ELEMENT AND MANUFACTURING METHOD AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an evaluation method and device for an electron emission element and a manufacturing method and device therefor capable of analyzing in a high precision and sensitivity the structure and condition of carbon or carbon compounds acquired from the sedimentary film in the activation process to aim at realizing a high-quality electron emission element and of reflecting the analytical results to the formation of the sedimentary film. SOLUTION: The vacuum treatment device has functions of not only an electron emission element manufacturing device (on and after the forming process), an electric characteristic measuring and evaluation device but also an evaluation device for the carbon or carbon compounds accumulated in the activation process.