ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an acceleration sensor which can be reduced in thickness and size, and manufactured at a low cost. SOLUTION: This acceleration sensor including a piezoelectric single plate constituted of an overlapping part and a detection part, is provided with a detection electrode detecting an electric signal generated in the detection part according to inertia force applied to the overlapping part and a ground electrode arranged on the surface facing the surface for forming the detection electrode.