| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface-treating apparatus which can quickly treat a surface in a highly quality even when the surface has a large area. SOLUTION: The casing (2) of this surface-treating apparatus (1) is divided into two chambers of a plasma generating chamber (3) provided with plasma generating electrodes (5) and (6) and a substrate treating chamber (4) provided with a substrate supporting table (9). The anode electrode (6) constituting the partition wall between the chambers (3) and (4) has a plasma blowing-out port (7). The upper surface of the port (7) has substantially continuous long slits which are formed in, for example, a spiral, etc., that can be drawn with a single stroke of a brush. |
