PRESSURE EMBEDDING TREATING DEVICE FOR SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To prevent floating of particles (dust) in a treating chamber when the treating chamber of a pressure container is evacuated (gas replaced). SOLUTION: The treating chamber 12 is formed of the pressure container 4 and upper and lower covers 8, 9 thereof. A valve means 27 for evacuating the chamber 12 is provided at the cover 9.