| 摘要 |
PROBLEM TO BE SOLVED: To provide a contour shape measuring method and apparatus capable of determining the contour shape of the subject of measurement without formation of blurred images (decrease in measuring accuracy) and without limitations on measuring areas and measuring resolution, the necessity of correction for magnifications, measuring errors due to multiple reflections, and limitations on the positional relationship between an image pickup optical system and the subject of measurement, so that the apparatus can measure every part of the subject. SOLUTION: The contour shape measuring apparatus or the like includes a sheet light source 2; a photocell 4 having a receiving surface parallel to the plane of sheet light; an optical imaging system 3 having an optical axis perpendicular to the plane of the sheet light and having the subject of measurement 1 and the photocell 4 disposed in positions away from the optical axis, for forming ort the receiving surface of the photocell 4 an image of the area of the subject of measurement 1 to which the sheet light is applied; and an image processing means for determining the contour shape of the subject of measurement 1 by subjecting image signals detected by the photocell 4 to image processing. The contour shape measuring method using such an apparatus is also described.
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