FORMING METHOD OF OPTICAL WAVEGUIDE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a forming method of an optical waveguide device capable of preventing the variation of the polarization characteristic of an optical waveguide polarizer, and obtaining the high extinction ratio stably in the optical waveguide device having the optical waveguide polarizer of a metal loading type. SOLUTION: An optical waveguide 2 and a buffer layer 3 are formed in a substrate 1 with the electro-optic effect. Next, the first opening part 8 is formed by removing the buffer layer 3 by the non-reactivity dry etching partially. Next, the optical waveguide polarizer 4 of the metal loading type is formed in the first opening part 8. Next, a signal electrode 5 being an electrode for the modulation and an earth electrode 6 are formed on the buffer layer 3.